MKS Instruments, headquartered in Andover, Massachusetts, employs 10,000 staff and offers solutions across three divisions: Vacuum, Photonics, and Materials, enhancing manufacturing process performance and productivity. Their technologies serve semiconductor and specialty industrial applications.
MKSI filed a patent for "method and apparatus for automatic self calibration of mass flow controller" on Fri, August 11, 2023. The patent was officially published on Thu, February 13, 2025.
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