ACM Research

Filed a patent for "coating and developing device" on Tue, February 20, 2024

Filed a patent for "substrate processing apparatus and method" on Mon, March 25, 2024

Filed a patent for "thin film deposition device, thin film deposition method and thin film deposition apparatus" on Mon, March 4, 2024

Filed a patent for "substrate processing method" on Fri, March 8, 2024

Filed a patent for "electroplating apparatus" on Thu, March 14, 2024

Filed a patent for "flipping apparatus" on Fri, January 12, 2024

Filed a patent for "plating apparatus and plating method" on Thu, November 23, 2023

Filed a patent for "method and apparatus for removing particles or photoresist on substrates" on Thu, May 11, 2023

Filed a patent for "system for cleaning semiconductor wafers" on Thu, August 17, 2023

Filed a patent for "substrate supporting apparatus" on Thu, March 28, 2024

Filed a patent for "cup-shaped chuck of substrate holding device and substrate holding device" on Thu, February 1, 2024

Filed a patent for "electroplating apparatus and electroplating method" on Thu, February 8, 2024

Filed a patent for "substrate treatment apparatus" on Fri, December 8, 2023

Filed a patent for "electroplating device and electroplating method" on Fri, December 8, 2023

Filed a patent for "deviation measurement device" on Fri, December 15, 2023

Filed a patent for "electroplating apparatus and electroplating method for non-circular substrate" on Thu, December 21, 2023

Filed a patent for "substrate cleaning method and apparatus" on Thu, November 3, 2022