MKS Instruments

Filed a patent for "magnification-compensated relay for control of an image location" on Fri, July 28, 2023

Filed a patent for "method and apparatus for automatic self calibration of mass flow controller" on Thu, February 13, 2025

Filed a patent for "conditioning device for reducing positional sensitivity of laser beam on photodetector and method of using the same" on Thu, March 7, 2024

Filed a patent for "endpoint detection system and methods of using the same" on Tue, June 27, 2023

Filed a patent for "pulse-shaping using a sub-region tuning apparatus and method" on Thu, January 2, 2025

Filed a patent for "laser processing systems and methods for beam dithering and skiving" on Thu, January 2, 2025

Filed a patent for "multiple characteristic optical sensor" on Thu, December 26, 2024

Filed a patent for "pulse-shaping using a sub-region tuning apparatus and method" on Wed, June 28, 2023

Filed a patent for "method and apparatus for compensating for thermally-induced beam pointing errors in a laser-processing system" on Mon, February 6, 2023

Filed a patent for "real time radical output monitoring using optical emission spectroscopy" on Tue, March 21, 2023

Filed a patent for "system and method for thermally-stable operation of acousto-optic deflector with reduced acoustic transients" on Fri, April 7, 2023

Filed a patent for "point of use inverted toroidal plasma source" on Mon, April 10, 2023

Filed a patent for "pulsed rf plasma generator with high dynamic range" on Tue, May 30, 2023

Filed a patent for "pulsed rf plasma generator with high dynamic range" on Fri, September 15, 2023

Filed a patent for "inverted plasma source" on Thu, December 5, 2024

Filed a patent for "pulsed rf plasma generator with high dynamic range" on Thu, December 5, 2024

Filed a patent for "enhanced tuning methods for mitigating rf load impedance variations due to periodic disturbances" on Thu, October 24, 2024

Filed a patent for "off-axis fiber optic sensor" on Wed, March 15, 2023

Filed a patent for "apparatus and method for current sensing using embedded electrodes" on Thu, September 19, 2024

Filed a patent for "off-axis fiber optic sensor" on Thu, September 19, 2024

Filed a patent for "method and apparatus for integrated pressure and flow controller" on Thu, August 22, 2024

Filed a patent for "method and apparatus for plasma ignition in toroidal plasma sources" on Thu, August 22, 2024

Filed a patent for "laser-processing apparatus, methods of operating the same, and methods of processing workpieces using the same" on Thu, September 5, 2024

Filed a patent for "non-invasive ied estimation for pulsed-dc and low frequency applications" on Thu, July 25, 2024

Filed a patent for "pulsed rf plasma generator with high dynamic range" on Fri, January 27, 2023