Veeco Instruments

Filed a patent for "plasma vessel cleaning for ion beam system" on Mon, July 31, 2023

Filed a patent for "integrated synchronous system for gridded ion sources" on Thu, May 18, 2023

Filed a patent for "wafer carrier assembly with improved temperature uniformity" on Fri, September 23, 2022

Filed a patent for "ion beam deposition of ruthenium thin films" on Mon, September 26, 2022

Filed a patent for "lightpipe for high temperature substrate processing" on Wed, October 26, 2022

Filed a patent for "multi-disc chemical vapor deposition system" on Mon, November 28, 2022

Filed a patent for "multi-disc chemical vapor deposition system with crossflow gas injection" on Mon, November 28, 2022

Filed a patent for "grid surface conditioning for ion beam system" on Thu, December 15, 2022

Filed a patent for "laser spike annealing process temperature calibration utilizing photoluminescence measurements" on Thu, August 24, 2023

Filed a patent for "scatter melt detection systems and methods of using the same" on Thu, November 9, 2023

Filed a patent for "wafer carrier assembly with improved temperature uniformity" on Thu, March 28, 2024

Filed a patent for "ion beam deposition of ruthenium thin films" on Thu, March 28, 2024

Filed a patent for "lightpipe for high temperature substrate processing" on Thu, May 2, 2024

Filed a patent for "grid surface conditioning for ion beam system" on Thu, June 20, 2024

Filed a patent for "multi-disc chemical vapor deposition system with cross flow gas injection" on Thu, May 30, 2024

Filed a patent for "multi-disc chemical vapor deposition system" on Thu, May 30, 2024

Filed a patent for "ion beam deposition of a low resistivity metal" on Thu, March 21, 2024

Filed a patent for "rotating disk reactor with split substrate carrier" on Thu, August 4, 2022

Filed a patent for "scatter melt detection systems and methods of using the same" on Tue, May 3, 2022