Axcelis Technologies

Filed a patent for "magnetic focusing device low energy ion beams" on Thu, February 6, 2025

Filed a patent for "method and apparatus for continuous chained energy ion implantation" on Thu, February 9, 2023

Filed a patent for "shielded gas inlet for an ion source" on Thu, May 4, 2023

Filed a patent for "wire or rod shaped extraction electrode optics" on Thu, May 2, 2024

Filed a patent for "high incidence angle graphite for particle control with dedicated low sputter yield ion beam" on Thu, July 27, 2023

Filed a patent for "hydraulic feed system for an ion source" on Thu, October 26, 2023

Filed a patent for "fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam" on Thu, November 2, 2023

Filed a patent for "ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or molecules" on Thu, February 1, 2024

Filed a patent for "dual source injector with switchable analyzing magnet" on Thu, January 25, 2024

Filed a patent for "dual source injector with switchable analyzing magnet" on Thu, September 28, 2023

Filed a patent for "method for setting gap between cathode and filament" on Thu, February 1, 2024

Filed a patent for "blended energy ion implantation" on Thu, February 9, 2023