KLA

Filed a patent for "system and method for duration-based sample path adjustment" on Thu, February 20, 2025

Filed a patent for "system and method for dynamic aberration correction" on Thu, February 20, 2025

Filed a patent for "pupil filter with spatially-varying transmission" on Thu, February 6, 2025

Filed a patent for "flexible measurement models for model based measurements of semiconductor structures" on Thu, February 13, 2025

Filed a patent for "overlay metrology target for die-to-wafer overlay metrology" on Thu, February 13, 2025

Filed a patent for "pecvd method and apparatus" on Thu, February 6, 2025

Filed a patent for "metrology in the presence of cmos under array (cua) structures utilizing model-less machine learning" on Fri, June 30, 2023

Filed a patent for "grating-over-grating overlay measurement with parallel color per layer" on Thu, December 26, 2024

Filed a patent for "white light interferometric inspection using tilted reference beam and spatial filtering" on Thu, December 26, 2024

Filed a patent for "vios modulator sensitivity for micro led backplane array electrical test" on Thu, December 26, 2024

Filed a patent for "metrology in the presence of cmos under array (cua) structures utilizing machine learning and physical modeling" on Thu, January 2, 2025

Filed a patent for "metrology in the presence of cmos under array (cua) structures utilizing an effective medium model with physical modeling" on Thu, January 2, 2025

Filed a patent for "metrology in the presence of cmos under array (cua) structures utilizing an effective medium model with classification of cua structures" on Thu, January 2, 2025

Filed a patent for "system and method for growth of quasi-phase matched strontium tetraborate and lithium triborate crystals for frequency conversion" on Thu, December 26, 2024

Filed a patent for "sliding outer tool enclosure" on Thu, December 12, 2024

Filed a patent for "autofocus method for single beam and multi-beam systems" on Thu, December 12, 2024

Filed a patent for "system and method for aligning a wafer to a chuck" on Thu, December 12, 2024

Filed a patent for "paraffinic compound addition to liquid crystals for reduced switching voltage on ncap-based electro-optical modulator" on Thu, December 12, 2024

Filed a patent for "optics for measurement of thick films and high aspect ratio structures" on Thu, December 19, 2024

Filed a patent for "combination of multiwavelength raman and spectroscopic ellipsometry to measure a film stack" on Thu, December 19, 2024

Filed a patent for "system and method for detecting chemically contaminated samples" on Thu, December 12, 2024

Filed a patent for "single grab pupil landscape via broadband illumination" on Thu, December 5, 2024

Filed a patent for "combined spectroscopic reflectometry and pattern recognition based measurements of semiconductor structures" on Thu, October 24, 2024

Filed a patent for "methods and systems for measurement of semiconductor structures with multi-pass statistical optimization" on Thu, October 24, 2024

Filed a patent for "full wafer measurement based on a trained full wafer measurement model" on Thu, October 24, 2024