Lam Research

Filed a patent for "low resistivity contacts and interconnects" on Tue, May 16, 2023

Filed a patent for "seam-free gapfill by inhibited atomic layer deposition" on Mon, August 21, 2023

Filed a patent for "interlaced, multi-zone gas distribution for asymmetric wafer bow compensation" on Wed, August 23, 2023

Filed a patent for "method for cleaning chamber with hydrogen fluoride" on Thu, August 24, 2023

Filed a patent for "deposition of molybdenum" on Fri, October 13, 2023

Filed a patent for "machine vision inspection of wafer processing tool" on Thu, February 15, 2024

Filed a patent for "lanthanum yttrium oxide component for semiconductor processing chamber" on Tue, August 15, 2023

Filed a patent for "electrostatic chuck with ceramic coating adhesion" on Wed, August 16, 2023

Filed a patent for "apparatus and method for splitting current from direct-drive radiofrequency signal generator between multiple coils" on Fri, May 31, 2024

Filed a patent for "chemical deposition system and method for deposition" on Fri, August 4, 2023

Filed a patent for "atomic layer etching using passivation and directional plasma" on Mon, August 7, 2023

Filed a patent for "method for simultaneous selective deposition of both metal and dielectric films" on Thu, August 10, 2023

Filed a patent for "end effector and substrate transfer sequence for thick, heavy, and/or bowed substrates with limited vertical clearances" on Fri, July 28, 2023

Filed a patent for "processing chamber precoat with trapping layer and sealing layer" on Fri, July 28, 2023

Filed a patent for "methods to improve thermal stability and film cracking margin for low temperature high tensile silicon nitride thin films" on Mon, July 31, 2023

Filed a patent for "processing tool showerhead with integrated static mixer" on Tue, August 1, 2023

Filed a patent for "plasma uniformity using a higher frequency signal to power an inner coil and a mixed signal of higher and lower frequency signals to power an outer coil" on Wed, August 2, 2023

Filed a patent for "voltage and current probe assemblies for radio frequency current carrying conductors" on Mon, March 25, 2024

Filed a patent for "electrostatic chuck with high-density plasma barrier coating" on Fri, July 21, 2023

Filed a patent for "dielectric etch using unsaturated carbon containing components" on Fri, July 21, 2023

Filed a patent for "molybdenum interconnect metallization and fill techniques" on Wed, July 26, 2023

Filed a patent for "all-in-one dry development for metal-containing photoresist" on Thu, July 27, 2023

Filed a patent for "deposition of metal-containing films using halogen-containing activator molecules" on Fri, July 14, 2023

Filed a patent for "laminated showerheads with multiple edge-fed plenums" on Fri, November 10, 2023

Filed a patent for "semiconductor processing chamber component with a laser glazed metal oxide intermediate layer" on Mon, July 10, 2023